EMLC 2012
E-Beam lithography on transparent substrates: challenges and results
IMS Workshop 2011
Latest results and computing performance of the ePLACE data preparation tool
SPIE 2009
Polarization-independent negative-index metamaterial in the near infrared
Optical Society of America 2009
A Solution to Meet New Challenges on EBDW Data Prep
EMLC 2009
High Resolution Cell Projection
ELMC 2009
Optimization of BSE-Detectors for E-Beam Direct Write Lithography
SPIE 2009
E-beam direct write alignment strategies for the next generation node
SPIE 2008
3D Template fabrication process for the Dual Damascene NIL approach
SPIE 2007
SPIE 2011
Multi-shaped beam: development status and update on lithography results (Proceedings Paper)
SPIE 2011
SPIE 2010
Multi Shaped E-Beam Proof of Lithography
SPIE 2010
Coulomb Blur Advantage of a Multi Shaped Beam Lithography Approach
SPIE 2009