Products

Vistec Electron Beam Lithography Group is providing leading edge technology solutions in all areas of advanced lithography, both in production for direct write and mask making as well as in applied research and nanotechnology. The company serves customers in the semiconductor industry including compound semiconductor and mask making, advanced research, optics and emerging markets like nanotechnology.

Vistec has Gaussian Beam and Variable Shaped Beam systems in its product portfolio.

Furthermore, the portfolio covers also wide range of different platforms from 150mm up to 300mm and 450mm travel range.