Gaussian Beam and Shaped Beam systems from Vistec for all areas of advanced electron-beam lithography

Products

Vistec Electron Beam GmbH develops, manufactures, sales and services 50kV Variable Shaped Beam lithography systems, which serve customers in both, semiconductor industry as well as advanced research, optics and several emerging markets.


The portfolio covers a wide range of universal platforms for 200mm, 300mm and 450mm travel range.