• We understand
    E-Beam.
    Leading technology solutions
    for advanced electron-beam lithography
  • We understand
    E-Beam.
    Leading technology solutions
    for advanced electron-beam lithography
  • We understand
    E-Beam.
    Variable Shaped Beam systems with
    high throughput and excellent performance
  • We understand
    E-Beam.
    Flexible e-beam solutions for
    a huge variety of applications

Welcome to Vistec Electron Beam GmbH

As a long-standing equipment supplier, Vistec Electron Beam GmbH is providing leading technology solutions for advanced electron-beam lithography. Based on the Variable Shaped Beam (VSB) principle, the electron-beam lithography systems are mainly utilized for semiconductor applications and advanced research as silicon direct write, compound semiconductor, mask making as well as integrated optics and photonics.

Next Events

Vistec Talk

New Vistec CD

We are pleased to announce that Vistec Electron Beam Gmbh has a new corporate design beginning Oct. 1, 2021.  The rebranding, especially the new logo, reflects Vistec’s identity as global provider of Variable Shaped Electron Beam…

Read more