• We understand
    E-Beam.
    Leading technology solutions
    for advanced electron-beam lithography
  • We understand
    E-Beam.
    Leading technology solutions
    for advanced electron-beam lithography
  • We understand
    E-Beam.
    Variable Shaped Beam systems with
    high throughput and excellent performance
  • We understand
    E-Beam.
    Flexible e-beam solutions for
    a huge variety of applications

Welcome to Vistec Electron Beam GmbH

As a long-standing equipment supplier, Vistec Electron Beam GmbH is providing leading technology solutions for advanced electron-beam lithography. Based on the Variable Shaped Beam (VSB) principle, the electron-beam lithography systems are mainly utilized for semiconductor applications and advanced research as silicon direct write, compound semiconductor, mask making as well as integrated optics and photonics.

Next Events

  • Moscone Center, San Francisco

    Semicon West

    collaborate & inspire @Booth #1051 South Hall, Moscone Center

    Read more
  • Leuven, Belgium

    MNE

    The 48th International Conference on Micro and Nano Engineering

    Read more
  • Jena, Germany

    MOC2022

    27th Microoptics Conference in Jena

    Read more

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