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E-Beam.
Flexible e-beam solutions for
a huge variety of applications

Optics

Gratings

Near IR Spectrometer Grating, 155 mm x 205 mm
System: Vistec SB350 OS
Source: Fraunhofer IOF, Germany

Curved Structures

(Cell Projection)
One spiral represents one mini-reticle
System: Vistec SB350 OS
Source: IAP Jena, Germany

Biophotonics

Network-based biocomputation (detail)
System: Vistec SB254
Source: Fraunhofer ENAS, Germany

Metamaterials

Negative Refractive Index Metamaterial
System: Vistec SB350 OS
Source: IPHT Jena, Germany

Silicon Photonics

2D fiber-to-waveguide coupler
System: SB3054
Source: CEA-LETI, France

3D Patterning

3D resist profile
System: Shaped Beam Series
Source: Vistec, Germany