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EPFL MicroNanoFabrication

Ecublens, Swiss

Annual Review Meeting

The scope of the forum is Micro & Nano Fabrication Techniques used in the following fields:

  • Nanostructure Physics (VCSELs, Quantum Opto-Electronics, III/V Devices, Nanotubes, Nanowires, Nanomechanics, ...)
  • Quantum sciences ant technology (quantum opto- electro- mechanics, superconducting devices, QDs, sensors, circuits)
  • Micro and Nanoelectronics (Soft Bioelectronic, 3D Integration, Nanowires, High-Q Resonators, New materials, ...)
  • Biomedical Applications (Microfluidics, Microelectrodes, Lab on a Chip, Probes, Neuroprosthetics, ...)
  • MEMS, NEMS (Sensors and Actuators, Motors, Tweezers, Artificial Muscles, Micro and Nanomechanics, ...)
  • Optics (Nanophotonics, Optomechanics, Photonic Crystals, MOEMS, Optofluidics, Fibers, ...)
  • Green Micro- and Nano-fabrication (Energy conversion, Catalytic Processing, Functional Materials, Chemistry …)
  • Material Sciences (Photovoltaic Materials, Piezoelectric materials, Nanoparticles, Energy Harvesting, Micro Fuel Cells, ...)
  • Fabrication Technologies (Lithography, Etching, Thin Films, ALD, EBEAM, CMP, Self assembly, Inkjet Printing, PDMS, ...)
  • Metrology and Defect Analysis (SEM, FIB, Ellipsometry, Reflectometry, AFM, EDX, Stress, Conductivity, ...)
  • Packaging and Assembly (Grinding, Wire Bonding, Encapsulation, ...

Weblink: https://cmi-events.epfl.ch/