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Welcome to Vistec Electron Beam GmbH

As a long-standing equipment supplier, Vistec Electron Beam GmbH is providing leading technology solutions for advanced electron-beam lithography. Based on the Variable Shaped Beam (VSB) principle, the electron-beam lithography systems are mainly utilized for semiconductor applications and advanced research as silicon direct write, compound semiconductor, mask making as well as integrated optics and photonics.

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Next Events

  • Live & Digital Event

    MINT Festival Jena

    Live & Virtual Event and Exhibition

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  • Torino, IT


    The 47th International Conference on Micro and Nano Engineering

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    Vistec Talk

    • Online Events

      As the worldwide COVID-19 situation continues in 2021, Vistec will join Semiconductor Events online.

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      Our Applications