Within the system of Deutscher Kalibrierdienst (DKD) calibration laboratories of industrial firms, research institutes, technical authorities, inspection and testing institutes carry out calibrations. These laboratories are accredited and supervised by the Accreditation Body of Deutsche Akkreditierungsstelle (DAkkS).
Vistec Electron Beam GmbH operates a calibration laboratory, which has been accredited since 1994 without interruption. The laboratory is labelled as D-K-18737-01-00. The accreditation is given for the SI unit "Length."
Amongst others, Vistec Electron Beam uses the LMS IPRO4 - a mask registration metrology system - by KLA-Tencor Corporation.
Mr. Uwe Schinkel
Phone: +49 3641 7998 175
Fax: +49 3641 7998 222
Measurement of positions and distances of both uni - and bidirectional edges on flat substrates (Chrome/Glass - masks)
A detailed description of the services can be found here.