28 February 2024 • 5:30 PM - 7:00 PM PST | Convention Center, Hall 2
Presenter: Markus Greul, Institut für Mikroelektronik Stuttgart (Germany)
"Impact of e-beam lithography and data preparation optimization on optical performance of integrated photonic waveguides"
M. Greul*, K. Edelmann*, S. Fasold, J. Hartbaum*, E. Linn, I. Stolberg, U. Weidenmueller
* Institut für Mikroelektronik Stuttgart, Germany & Vistec Electron Beam GmbH, Germany