Veröffentlichungen Variable shaped Beam systems with high throughput and excellent performance

Veröffentlichungen Variable shaped Beam systems with high throughput and excellent performance

Veröffentlichungen

Sub-nanometer address grid in variable shaped e-beam lithography for efficient inscription of high-precision large-area optical gratings

Photonics Research, Vol. 13, Ausgabe 12, Seiten 3286-3294, 2025
Optimal shape approximation and writing strategy for integrated photonic waveguides fabricated with variable-shaped electron-beam lithography

JM3 Vol.24 Issue 01/2025
Potential of E-beam lithography for micro- and nano-optics fabrication on large areas

SPIE AL 2023
Efficient exposure of non-Manhattan layouts for optical applications using variable shaped beam lithography

JM3 Vol.22 Issue 04/2023
Electron beam direct write: the versatile ally of optical lithography

JM3 Vol.22 Issue 04/2023
New Data Prep Solutions for the Exposure of Non-Manhattan Structures with Vistec VSB E-Beam Writers

Beams & More 2022
Lithographic performance of resist ma-N 1402 in an e-beam/i-line stepper intra-level mix and match approach

EMLC 2022
Optical metasurfaces made by cell projection lithography

PhotonicsViews 05 2022
English Novel 1064 nm DBR lasers combining active layer removal and surface gratings

The Institution of Engineering and Technology 2021
Surface enhanced Raman spectroscopy-based evaluation of the membrane protein composition of the organohaliderespiring Sulfurospirillum multivorans

Analytical Science Journals Online Library Wiley 2021

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