Efficient exposure of non-Manhattan layouts for optical applications using variable shaped beam lithography JM3 Vol.22 Issue 04/2023
New Data Prep Solutions for the Exposure of Non-Manhattan Structures with Vistec VSB E-Beam Writers Beams & More 2022
Lithographic performance of resist ma-N 1402 in an e-beam/i-line stepper intra-level mix and match approach EMLC 2022
English Novel 1064 nm DBR lasers combining active layer removal and surface gratings The Institution of Engineering and Technology 2021
Surface enhanced Raman spectroscopy-based evaluation of the membrane protein composition of the organohaliderespiring Sulfurospirillum multivorans Analytical Science Journals Online Library Wiley 2021
Hybrid E-beam lithography and process improvement for nanodevice fabrication Photomask Technology 2020
