Investigation and optimization of Rowland ghosts in high efficiency spectrometer gratings fabricated by e-beam lithography SPIE Opto 2016
Design and fabrication of titanium dioxide wire grid polarizer for the far ultraviolet spectral range SPIE 2016
Direct comparison of the performance of commonly used e-beam resists during nano-scale plasma etching of Si, SiO2 & Cr SPIE AL 2015
Low-crosstalk fabrication-insensitive echelle grating demultiplexers on Silicon-on-Insulator SPIE Photonics West 2015
Integration of E-Beam Direct Write in BEOL processes of 28nm SRAM technology node using Mix & Match EMLC 2014
Influence of high-energy electron irradiation on ultra-low-k characteristics and transistor performance SPIE 2013
Fabrication technology of GaN/AlGaN HEMT slanted sidewall gates using thermally reflowed ZEP resist and CHF3/SF6 plasma etching CS Mantech 2013
Polarization-independent negative-index metamaterial in the near infrared Optical Society of America 2009
