Veröffentlichungen Variable shaped Beam systems with high throughput and excellent performance

Veröffentlichungen Variable shaped Beam systems with high throughput and excellent performance

Veröffentlichungen

Sub-nanometer address grid in variable shaped e-beam lithography for efficient inscription of high-precision large-area optical gratings

Photonics Research, Vol. 13, Ausgabe 12, Seiten 3286-3294, 2025
Optimal shape approximation and writing strategy for integrated photonic waveguides fabricated with variable-shaped electron-beam lithography

JM3 Vol.24 Issue 01/2025
Potential of E-beam lithography for micro- and nano-optics fabrication on large areas

SPIE AL 2023
Efficient exposure of non-Manhattan layouts for optical applications using variable shaped beam lithography

JM3 Vol.22 Issue 04/2023
Lithographic performance of resist ma-N 1402 in an e-beam/i-line stepper intra-level mix and match approach

EMLC 2022
English Novel 1064 nm DBR lasers combining active layer removal and surface gratings

The Institution of Engineering and Technology 2021
Surface enhanced Raman spectroscopy-based evaluation of the membrane protein composition of the organohaliderespiring Sulfurospirillum multivorans

Analytical Science Journals Online Library Wiley 2021
Sub-20 nm multilayer nanopillar patterning for hybrid SET/CMOS integration

MNE 2020
Hybrid E-beam lithography and process improvement for nanodevice fabrication

Photomask Technology 2020
Integrated photonic guided metalens based on a pseudo-graded index distribution

Sci Rep 10, 3770 in 2020

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