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Welcome to Vistec Electron Beam GmbH

As a long-standing equipment supplier, Vistec Electron Beam GmbH is providing leading technology solutions for advanced electron-beam lithography. Based on the Variable Shaped Beam (VSB) principle, the electron-beam lithography systems are mainly utilized for semiconductor applications and advanced research as silicon direct write, compound semiconductor, mask making as well as integrated optics and photonics.

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Next Events

  • Minneapolis, USA


    The 63rd international conference on electron, ion and photon beam technology and...

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  • Dresden, Germany


    Booth @ the 35th European Mask and Lithography Conference

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    Vistec Talk

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