COMPANY Variable Shaped Beam systems with high throughput and excellent performance

COMPANY Variable Shaped Beam systems with high throughput and excellent performance

About us

Vistec Electron Beam GmbH provides leading technology solutions for advanced electron-beam lithography. The Variable Shaped Beam systems are mainly utilized for semiconductor applications, advanced research as well as integrated optics.

News and Events

EMLC 2026

41st Mask and Lithography Conference in Jena!

Visit us at booth #10!

NIL Industrial day

Annual Meeting - 15th edition