In the T1 Poster-Session on Wednesday "Micro/nanostructuring" Sep 18th, starting 4.30pm we'll present "Tuning the optical performance of photonic structures by optimized Variable Shaped Beam lithography"
Investment in new production tool for the semiconductor equipment industry.
Jenoptik is investing a low double-digit million-euro amount in a state-of-the-art system for the high-tech fab currently under construction in Dresden. The new…
