Nano Imprint
Semiconductor

Pillars Ø 500 nm, h: 1.5 μm on 15 μm pedestal
System: Vistec SB352 HR
Source: IMS Chips, Germany
Optics

Nano-Imprint Master for optical Metasurface
System: Vistec SB350 OS
Source: Fraunhofer IOF, Germany
Pillars Ø 500 nm, h: 1.5 μm on 15 μm pedestal
System: Vistec SB352 HR
Source: IMS Chips, Germany
Nano-Imprint Master for optical Metasurface
System: Vistec SB350 OS
Source: Fraunhofer IOF, Germany