COMPANY Variable Shaped Beam systems with high throughput and excellent performance

COMPANY Variable Shaped Beam systems with high throughput and excellent performance

About us

Vistec Electron Beam GmbH provides leading technology solutions for advanced electron-beam lithography. The Variable Shaped Beam systems are mainly utilized for semiconductor applications, advanced research as well as integrated optics.

News and Events

SEMICON EUROPE 2026

Visit us @ Booth #B1679

Semicon West

You will find us at Booth # 1245-04 (German Pavilion)