History
Important Milestones
- 2021
Rebranding
- 2019
Vistec SB3050-2, 300mm
- 2015
Vistec opens Showroom with Variable Shaped Beam System in Schaumburg, Illinois USA
- 2014
Vistec SB254, 200mm
- 2012
New Ownership for Vistec Electron Beam GmbH, Jena
- 2011
Vistec SB3055
- 2008
Vistec SB3050
- 2006
Vistec SB250
- 2005
Leica Microsystems Lithography GmbH becomes Vistec Electron Beam GmbH
- 2004
Leica Microsystems SB351
- 2000
Leica Microsystems ZBA32
- 1996
Leica Cambridge Ltd. and Jenoptik Lithography join and the company in Jena becomes Leica Lithographie Systeme Jena GmbH.
- 1995
Jenoptik ZBA31
- 1993
Introduction of the first 300mm precision vacuum stage by Jenoptik
- 1990
After Germany's reunification the successful Carl Zeiss spin-off Jenoptik takes over Carl Zeiss Lithography business
- 1987
Carl Zeiss Jena ZBA21
- 1984
Carl Zeiss Jena ZBA20
- 1978
Carl Zeiss Jena ZBA10
- 1974
Carl Zeiss Jena launches the first commercial Variable Shaped Beam system