Annual Meeting - 23rd edition


Date : Tuesday May 14th, 2024
Time : 09h00 - 18h00
Place : SwissTech Convention Center


Program :
- 10 invited speakers (Program)
- 200 posters presented by the authors
- 30 exhibition booths

The posters show the research projects realized during the last 12 months in the EPFL Center of MicroNanoTechnology (CMi).

The scope of the forum is Micro & Nano Fabrication Techniques used in the following fields:
- Nanostructure Physics (VCSELs, Quantum Opto-Electronics, III/V Devices, Nanotubes, Nanowires, Nanomechanics, ...)
- Quantum sciences ant technology (quantum opto- electro- mechanics,  superconducting devices, QDs, sensors, circuits)
- Micro and Nanoelectronics (Soft Bioelectronic, 3D Integration, Nanowires, High-Q Resonators, New materials, ...)
- Biomedical Applications (Microfluidics, Microelectrodes, Lab on a Chip, Probes, Neuroprosthetics,  ...)
- MEMS, NEMS (Sensors and Actuators, Motors, Tweezers,  Artificial  Muscles, Micro and Nanomechanics, ...)
- Optics (Nanophotonics, Optomechanics, Photonic Crystals, MOEMS, Optofluidics, Fibers, ...)
- Material Sciences (Photovoltaic Materials, Piezoelectric materials, Nanoparticles, Energy Harvesting, Micro Fuel Cells, ...)
- Fabrication Technologies (Lithography, Etching, Thin Films, ALD, EBEAM, CMP, Self assembly, Inkjet Printing, PDMS, ...)
- Metrology and Defect Analysis (SEM, FIB, Ellipsometry, Reflectometry, AFM, EDX, Stress, Conductivity, ...)
- Packaging and Assembly (Grinding, Wire Bonding, Encapsulation, ...)