Publications Flexibel e-beam solutions for a huge variety of applications

Publications Flexibel e-beam solutions for a huge variety of applications

Publications

Potential of E-beam lithography for micro- and nano-optics fabrication on large areas

SPIE AL 2023
Efficient exposure of non-Manhattan layouts for optical applications using variable shaped beam lithography

JM3 Vol.22 Issue 04/2023
Electron beam direct write: the versatile ally of optical lithography

JM3 Vol.22 Issue 04/2023
New Data Prep Solutions for the Exposure of Non-Manhattan Structures with Vistec VSB E-Beam Writers

Beams & More 2022
Lithographic performance of resist ma-N 1402 in an e-beam/i-line stepper intra-level mix and match approach

EMLC 2022
Optical metasurfaces made by cell projection lithography

PhotonicsViews 05 2022
English Novel 1064 nm DBR lasers combining active layer removal and surface gratings

The Institution of Engineering and Technology 2021
Surface enhanced Raman spectroscopy-based evaluation of the membrane protein composition of the organohaliderespiring Sulfurospirillum multivorans

Analytical Science Journals Online Library Wiley 2021
Sub-20 nm multilayer nanopillar patterning for hybrid SET/CMOS integration

MNE 2020
Hybrid E-beam lithography and process improvement for nanodevice fabrication

Photomask Technology 2020

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