Publications Flexibel e-beam solutions for a huge variety of applications

Publications Flexibel e-beam solutions for a huge variety of applications

Publications

Investigation and optimization of Rowland ghosts in high efficiency spectrometer gratings fabricated by e-beam lithography

SPIE Opto 2016
Design and fabrication of titanium dioxide wire grid polarizer for the far ultraviolet spectral range

SPIE 2016
Direct comparison of the performance of commonly used e-beam resists during nano-scale plasma etching of Si, SiO2 & Cr

SPIE AL 2015
Low-crosstalk fabrication-insensitive echelle grating demultiplexers on Silicon-on-Insulator

SPIE Photonics West 2015
Integration of E-Beam Direct Write in BEOL processes of 28nm SRAM technology node using Mix & Match

EMLC 2014
Resolution enhancement for advanced aligner lithography using phase-shifting photomasks

ODS 2014
Influence of high-energy electron irradiation on ultra-low-k characteristics and transistor performance

SPIE 2013
Fabrication technology of GaN/AlGaN HEMT slanted sidewall gates using thermally reflowed ZEP resist and CHF3/SF6 plasma etching

CS Mantech 2013
Polarization-independent negative-index metamaterial in the near infrared

Optical Society of America 2009
A Solution to Meet New Challenges on EBDW Data Prep

EMLC 2009

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