We understand
Variable Shaped Beam systems with
high throughput and excellent performance

Calibration Services

Within the system of Deutscher Kalibrierdienst (DKD) calibration laboratories of industrial firms, research institutes, technical authorities, inspection and testing institutes carry out calibrations. These laboratories are accredited and supervised by the Accreditation Body of Deutsche Akkreditierungsstelle (DAkkS).

Vistec Electron Beam GmbH operates a calibration laboratory, which has been accredited since 1994 without interruption. The laboratory is labelled as D-K-18737-01-00. The accreditation is given for the SI unit "Length."

Recently we have upgraded our QM system to the new DIN EN ISO / IEC 17025: 2018 and successfully completed the DAkkS assessment on 25.05. & 26.05.2019.

Amongst others, Vistec Electron Beam uses the LMS IPRO4 - a mask registration metrology system - by KLA-Tencor Corporation.


Mr. Uwe Schinkel
Phone: +49 3641 7998 175
Fax:      +49 3641 7998 222

Service description

Measurement of positionsand distances of both uni - and bidirectional edges on flat substrates (Chrome/Glass - masks)

Calibration of:

  • line scales (stage micrometers)
  • two dimensional calibration standards
    (cross structure arrays, circle pattern arrays)
  • center coordinate, diameter and roundness of chrome-circles
  • grid orthogonality and angle between microstructures
  • line width of microstructures

A detailed description of the services can be found here.