Calibration Service
Vistec Electron Beam GmbH operates a calibration laboratory. The laboratory is accredited by the DAkkS (Deutsche Akkreditierungsstelle) for measurement of the SI unit "Length" since 1994.
Services include
Measurement of positions and distances of both uni - and bidirectional edges on flat substrates (Chrome/Glass - masks)
Calibration of
- line scales (stage micrometers)
- two dimensional calibration standards (cross structure arrays, circle pattern arrays)
- center coordinate, diameter and roundness of chrome-circles
- grid orthogonality and angle between microstructures
- line width of microstructures
Contact
Mr. Uwe Schinkel
Phone: +49 3641 7998 175
Fax: +49 3641 7998 222
measurement@vistec-semi.com